HOLDING TABLE AND PROCESSING DEVICE

To provide a holding table in which a tape can be peeled off easily.SOLUTION: A holding table, which is used in holding a work-piece, comprises a holding member which has a front surface and a rear surface at the opposite side of the front surface, at least portions of which are transparent from the front surface to the rear surface, and a coating layer made of materials containing polytetrafluoroethylene, which coats the transparent portion of the front surface of the holding member. In the holding member is formed a suction path whose one end opens to the front surface and whose other end is connected to a suction source. The holding table holds the work-piece thereon through a tape, by suctioning the tape through one end of the suction path, with the tape to be attached to the work-piece contacted with the coating layer.SELECTED DRAWING: Figure 3 【課題】テープを簡単に剥がせる保持テーブルを提供する。【解決手段】被加工物を保持する際に使用される保持テーブルであって、表面及び表面とは反対側の裏面を有し、少なくとも一部が表面から裏面まで透明な保持部材と、ポリテトラフルオロエチレンを含む材料からなり、保持部材の透明な一部の表面を被覆する被覆層と、を備え、保持部材には、一端が表面に開口し、他端が吸引源に接続される吸引路が形成されており、被加工物に貼付されるテープを被覆層に接触させた状態で、テープを吸引路の一端で吸引することにより、テープを介して被加工物を保持する保持テーブルが提供される。【選択図】図３