PIEZOELECTRIC DRIVING DEVICE, METHOD FOR MANUFACTURING PIEZOELECTRIC DRIVING DEVICE, AND ROBOT

To provide a piezoelectric driving device that has a high adhesive strength at a leading end to a diaphragm and a method for manufacturing the same, and a robot including the piezoelectric driving device.SOLUTION: A piezoelectric driving device comprises: a diaphragm that has a piezoelectric element, a first surface, and a concave part arranged in the first surface; a leading end that has a second surface opposite to the first surface and a convex part arranged in the concave part, and transmits the vibration of the diaphragm to a driven part; and an adhesive that is arranged between the first surface and the second surface and between the concave part and the convex part.SELECTED DRAWING: Figure 13 【課題】振動板に対する先端部の接着強度が高い圧電駆動装置およびその製造方法、ならびに、前記圧電駆動装置を備えるロボットを提供すること。【解決手段】圧電素子、第１面、および前記第１面に配置されている凹部を有する振動板と、前記第１面と対向する第２面と、前記凹部内に配置されている凸部と、を有し、被駆動部に前記振動板の振動を伝達する先端部と、前記第１面と前記第２面との間、および、前記凹部と前記凸部との間に配置されている接着剤と、を備えることを特徴とする圧電駆動装置。【選択図】図１３