VAPOR DEPOSITION SOURCE EVAPORATOR, AND MANUFACTURING METHOD OF VAPOR DEPOSITION SOURCE EVAPORATOR

To provide a vapor deposition source evaporator, and its manufacturing method.SOLUTION: A vapor deposition source evaporator includes a crucible unit storing a vapor deposition source, and having an injection part on one side, a heater for heating the crucible unit, and evaporating the vapor deposit...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: JUNG KI CHAE, AN BYOUNGGU, CHO YUN HYUNG, KIM KYUN HAN, CHO WON SEOK, CHA MIN CHEOL, PARK JAE MORK
Format: Patent
Sprache:eng ; jpn
Schlagworte:
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