VAPOR DEPOSITION SOURCE EVAPORATOR, AND MANUFACTURING METHOD OF VAPOR DEPOSITION SOURCE EVAPORATOR
To provide a vapor deposition source evaporator, and its manufacturing method.SOLUTION: A vapor deposition source evaporator includes a crucible unit storing a vapor deposition source, and having an injection part on one side, a heater for heating the crucible unit, and evaporating the vapor deposit...
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Format: | Patent |
Sprache: | eng ; jpn |
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