VAPOR DEPOSITION SOURCE EVAPORATOR, AND MANUFACTURING METHOD OF VAPOR DEPOSITION SOURCE EVAPORATOR

To provide a vapor deposition source evaporator, and its manufacturing method.SOLUTION: A vapor deposition source evaporator includes a crucible unit storing a vapor deposition source, and having an injection part on one side, a heater for heating the crucible unit, and evaporating the vapor deposit...

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Bibliographische Detailangaben
Hauptverfasser:	JUNG KI CHAE, AN BYOUNGGU, CHO YUN HYUNG, KIM KYUN HAN, CHO WON SEOK, CHA MIN CHEOL, PARK JAE MORK
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PERFORMING OPERATIONS SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR SHAPING OR JOINING OF PLASTICS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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Beschreibung
Zusammenfassung:	To provide a vapor deposition source evaporator, and its manufacturing method.SOLUTION: A vapor deposition source evaporator includes a crucible unit storing a vapor deposition source, and having an injection part on one side, a heater for heating the crucible unit, and evaporating the vapor deposition source through the injection part, and a radiation heat prevention plate for suppressing heat radiation through the injection part side, in which either of the crucible unit and the radiation heat prevention plate is made of a carbon fiber composite material.SELECTED DRAWING: Figure 3 【課題】蒸着源蒸発装置及びその製造方法を提供する。【解決手段】蒸着源を収容し、一側に噴射部が具備されたるつぼユニットと、るつぼユニットを加熱し、噴射部を介して蒸着源を蒸発させるヒータと、噴射部側を介した放熱を抑制する放射熱防止板と、を含み、該るつぼユニットと該放射熱防止板とのうちいずれか一つが、炭素ファイバ複合材によって作製された蒸着源蒸発装置である。【選択図】図３