MANUFACTURING APPARATUS AND MANUFACTURING METHOD OF RESIN FILM WITH METAL FILM

To provide an apparatus and a method for manufacturing a resin film having a metal film, in which pinholes are unlikely to be formed in a metal film formed on a metal seed layer (seed layer) by a wet plating method.SOLUTION: A manufacturing apparatus includes a film unwinding roll, an interleaf winding roll, a wet plating bath, and a film winding roll. In the film unwinding roll, a long resin film (film) on which a seed layer is formed on both sides by a vapor deposition process is wound while sandwiching an interleaf between the layers. The interleaf winding roll separates the interleaf from the film and winds it up. In the wet plating bath, the film in which interleaving paper is separated is loaded, and a metal film is formed on each seed layer. The film winding roll winds up the film on which a metal film is formed. A first cleaning section 810 and a second cleaning section 820 for plasma cleaning the surface of each seed layer of the film from which the interleaf is separated are arranged side by side in the conveyance direction of the film 10 between the film unwinding roll and the wet plating bath. An exhaust pipe that exhausts the plasma gas that has flowed around the film back surface side and prevented back surface oxidation is provided in each of the cleaning sections.SELECTED DRAWING: Figure 7 【課題】湿式メッキ法で金属シード層(シード層)上に形成される金属膜にピンホールが生じ難い金属膜付き樹脂フィルムの製造装置と方法を提供する。【解決手段】真空成膜法でシード層を両面成膜した長尺樹脂フィルム(フィルム)が層間に合紙を挟み込みながら巻回されたフィルム巻出ロールと、フィルムから合紙を分離して巻き取る合紙巻取ロールと、合紙が分離されたフィルムを搬入し各シード層上に金属膜を形成する湿式メッキ槽と、金属膜が形成されたフィルムを巻き取るフィルム巻取ロールを備えた製造装置において、フィルム巻出ロールと湿式メッキ槽間に、合紙が分離されたフィルムの各シード層表面をプラズマ洗浄する第一洗浄部810と第二洗浄部820がフィルム10の搬送方向に沿って並んで設けられ、各洗浄部にはフィルム裏面側に回り込んだプラズマガスを排気して裏面酸化を防止する排気管が付設されていることを特徴とする。【選択図】図７