SUBSTRATE CARRYING METHOD, SUBSTRATE CARRYING DEVICE PROVIDED WITH THE SUBSTRATE CARRYING METHOD AND SUBSTRATE PROCESSING DEVICE WITH SUBSTRATE CARRYING DEVICE COMPOSED OF SUBSTRATE CARRYING DEVICE AND SUBSTRATE PROCESSING DEVICE

To provide a substrate carrying device which is inexpensive, moreover, does not require drastic change of layout or the like and, further, performs additional installation to the existing substrate processing device simply and reliably.SOLUTION: A substrate carrying device 2 where storage devices 3, 4 before and after processing on both ends are arranged in order to carry-in and project a substrate 9 before processing to a substrate processing device 11 and further in order to discharge and carry-out a substrate 10 after processing is developed in parallel to processing parts 13a to 13f of a processing table 12 which are arranged side by side, therefore, carrying-in/carrying-out operations of the substrates before and after processing can be performed while opening an upper part of the storage device, the structure is simplified and is made inexpensive and fault can be prevented, moreover, carrying-in/carrying-out operations of the substrates before and after the processing are respectively concentrated onto one portion to reduce the number of operation processes of the whole device, at the same time, supply/recovery of the substrates on each substrate storage device are performed on lateral surfaces to save a space, therefore, installation, operation space or the like is minimized, addition of the substrate carrying device and additional installation of the whole device can be performed inexpensively and, moreover, can be performed simply and reliably without drastic change of layout or the like.SELECTED DRAWING: Figure 1 【課題】基板搬送装置を、安価にしかも大幅なレイアウト等の変更なしに提供し、しかも既存の基板加工装置への追加設置をも簡易かつ確実に行うものである。【解決手段】基板加工装置１１に加工前基板９を搬入して投入し、また加工後基板１０を排出して搬出するために加工前後の収納装置３、４を両端に配置する基板搬送装置２を、複数並設する加工テーブル１２の加工部１３ａ〜１３ｆに対して平行に展開するので、加工前後の基板の搬入・搬出作業は収納装置の上部を開放して行えて、構造を単純化して安価に、且つ故障を防止でき、しかも加工前後の基板の搬入・搬出作業も各々一箇所に集中して装置全体の作業工程数を削減しつつ、各基板収納装置での基板の供給・回収も側面で行って省スペース化するので、設置や作業スペース等が最小限になり、基板搬送装置の追加や新たな装置全体の設置を、安価にしかも大幅なレイアウト等の変更なしに簡易かつ確実に行える。【選択図】図１