METHOD OF FABRICATING MULTIPLE LINEAR ARRAYS WITH SUBMICRON Y-AXIS ALIGNMENT

To provide methods of forming a dual linear sensor/emitter array with near perfect alignment between upper and lower sensor/emitter arrays, and methods of forming sensor/emitter arrays with near perfect alignment between three or more grouped sensor/emitter arrays.SOLUTION: There is provided a metho...

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Bibliographische Detailangaben
Hauptverfasser:	JOSEPH F CASEY, REDDING GARY D
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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