WAFER DETECTION DEVICE, WAFER DETECTION METHOD, AND PROBER

To provide a wafer detection device and a wafer detection method capable of both accurately determining the occurrence of a detection error and preventing a decrease in throughput, and a prober including the wafer detection device.SOLUTION: A wafer detection device includes a detection sensor that detects a wafer, a scanning mechanism that scans the detection sensor at a first speed in the first direction along a wafer accommodation position for each wafer in a cassette, a determination unit that determines the presence or absence of a detection error by the detection sensor on the basis of the detection result of the detection sensor while scanning in the first direction, and a scanning control unit that controls the scanning mechanism to rescan the detection sensor in the first direction at a second speed that is a predetermined second speed and in which the probability in which the determination unit erroneously determine whether a detection error has occurred is lower than the first speed when the determination unit determines that a detection error has occurred.SELECTED DRAWING: Figure 4 【課題】検出エラーの発生の正確な判定と、スループットの低下防止とを両立可能なウェーハ検出装置及びウェーハ検出方法と、このウェーハ検出装置を備えるプローバを提供する。【解決手段】ウェーハを検出する検出センサと、検出センサを、カセット内のウェーハごとのウェーハ収容位置に沿って第１方向に第１速度で走査する走査機構と、第１方向に走査中の検出センサの検出結果に基づき、検出センサによる検出エラーの発生の有無を判定する判定部と、判定部が検出エラーの発生有と判定した場合に、走査機構を制御して、検出センサを、予め定められた第２速度であって且つ判定部が検出エラーの発生の有無を誤判定する確率が第１速度よりも低い第２速度で第１方向に再走査する走査制御部と、を備える。【選択図】図４