LEAKAGE INSPECTION METHOD, LEAKAGE INSPECTION DEVICE, PLATING METHOD, AND PLATING DEVICE

To provide a leakage inspection method and a leakage inspection device capable of appropriately determining the degree of leakage.SOLUTION: A leakage inspection method executes: a first inspection for measuring the pressure of an internal space R while evacuating the internal space R formed by a sealing member 45 of a substrate holder 24 and detecting that the pressure reaches a first pressure threshold within a predetermined first inspection time; a second inspection for sealing the evacuated internal space R after the first inspection, measuring the pressure of the sealed internal space R, and detecting that the pressure of the sealed internal space R does not exceed a second pressure threshold within a predetermined second inspection time; and a third inspection for measuring a pressure difference between the pressure of the sealed internal space R and the vacuum pressure inside a master container 120 after the second inspection and detecting that a rising width of the pressure difference within a predetermined third inspection time is maintained to be the pressure difference threshold or less.SELECTED DRAWING: Figure 6 【課題】漏れの程度を適切に判別することができる漏れ検査方法および漏れ検査装置を提供する。【解決手段】本方法は、基板ホルダ２４のシール４５によって形成される内部空間Ｒを真空排気しながら、内部空間Ｒの圧力を測定し、上記圧力が所定の第１検査時間内に第１の圧力しきい値に達したことを検出する第１検査を実施し、第１検査後、真空排気された内部空間Ｒを封止し、封止された内部空間Ｒの圧力を測定し、所定の第２検査時間内における封止された内部空間Ｒの圧力が第２の圧力しきい値を超えて上昇しないことを検出する第２検査を実施し、第２検査後、封止された内部空間Ｒの圧力と、マスター容器１２０内の真空圧力との圧力差を測定し、所定の第３検査時間内における上記圧力差の上昇幅が圧力差しきい値以下に維持されていることを検出する第３検査を実施する。【選択図】図６