GANTRY STAGE CONTROL METHOD AND CONTROL DEVICE

To provide a gantry stage control method and control device on the basis of an NCTF control method that enables high-accuracy and high-speed positioning without requiring special knowledge about control theory with easy design flow and controller adjustment.SOLUTION: Due to NCTF control based on a r...

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Bibliographische Detailangaben
Hauptverfasser:	SATO KAIJI, AKAMATSU KAORU
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORSOR DYNAMO-ELECTRIC CONVERTERS CONTROLLING CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ELECTRICITY FUNCTIONAL ELEMENTS OF SUCH SYSTEMS GENERATION MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
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Beschreibung
Zusammenfassung:	To provide a gantry stage control method and control device on the basis of an NCTF control method that enables high-accuracy and high-speed positioning without requiring special knowledge about control theory with easy design flow and controller adjustment.SOLUTION: Due to NCTF control based on a reference characteristic locus obtained from an open loop experiment using an input signal to a linear motor when positioning with a gantry stage where a table is installed on a surface plate via two linear motors arranged in parallel, the two linear motors are independently controlled to cause the table to follow the vibration caused by the surface plate and suppress the high frequency vibration generated in a process of causing the table to follow the vibration of the surface plate.SELECTED DRAWING: Figure 10 【課題】設計の流れ、制御器の調整が容易であり、制御理論に関する特別な知識を必要とせずに、高精度で高速な位置決めを可能とする、ＮＣＴＦ制御法に基づくガントリーステージの制御方法及及び制御装置を提供する。【解決手段】平行配置した２つのリニアモータを介して定盤にテーブルが設置されているガントリーステージで位置決めをする際に、リニアモータへの入力信号を用いた開ループ実験より得られる規範特性軌跡に基づくＮＣＴＦ制御により、定盤に起因する振動にテーブルを追従させ、定盤の振動にテーブルを追従させる過程で発生する高周波振動を抑制する制御を、２つのリニアモータ夫々に対して独立して行う。【選択図】図１０