USE OF SYNTHETIC OIL IN VACUUM PUMP, AND VACUUM PUMP

To provide a vacuum pump, in particular, a turbo molecular pump capable of transporting a sufficient amount of a synthetic oil for lubricating a rotation supporting portion, not requiring additional installation of an oil pump, improving performance, and not significantly increasing costs.SOLUTION:...

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Bibliographische Detailangaben
1. Verfasser:	KOCI BERND
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BLASTING HEATING LIGHTING MECHANICAL ENGINEERING NON-POSITIVE DISPLACEMENT PUMPS POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS WEAPONS
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Beschreibung
Zusammenfassung:	To provide a vacuum pump, in particular, a turbo molecular pump capable of transporting a sufficient amount of a synthetic oil for lubricating a rotation supporting portion, not requiring additional installation of an oil pump, improving performance, and not significantly increasing costs.SOLUTION: A synthetic oil having a kinematic viscosity in a range of 4.5-6.5 mm/s at 100°C is used as a working medium of a vacuum pump, the vacuum pump has a working medium storage portion for storing the synthetic oil, and a rotation supporting portion of the vacuum pump is lubricated by the synthetic oil by supplying the synthetic oil to the rotation supporting portion.SELECTED DRAWING: Figure 1 【課題】回転支承部の潤滑のための合成オイルを十分な量搬送出来、追加的なオイルポンプを設ける必要がなく、性能を高め、かつ著しいコスト上昇が無い真空ポンプ、特にターボ分子ポンプを提供する。【解決手段】真空ポンプの作動媒体として１００℃において４．５から６．５ｍｍ２／ｓの領域の動粘度である合成オイルを使用し、真空ポンプは合成オイルの収容のための作動媒体貯蔵部を有し、合成オイルが回転支承部に供給されることにより、真空ポンプの回転支承部が合成オイルによって潤滑される。【選択図】図１