PHOTOEMISSION ELECTRON MICROSCOPE
To provide a photoemission electron microscope that has high spatial resolving power capable of observing a bulk sample.SOLUTION: A photoemission electron microscope is composed of: an objective lens 6 that is an electric field magnetic field overlapping type characterized in which a tip 13 of a yok...
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| creator | TSUNO KATSUSHIGE MUTO MASAO |
| description | To provide a photoemission electron microscope that has high spatial resolving power capable of observing a bulk sample.SOLUTION: A photoemission electron microscope is composed of: an objective lens 6 that is an electric field magnetic field overlapping type characterized in which a tip 13 of a yoke cone part 15 facing a sample 9 is shaped into a ring (an external diameter r1 and inner diameter r2), the external diameter r1 is more than three times a distance g between the tip 13 and sample 9, an angle (cone angle) 14 formed with the yoke cone part 15 with respect to a surface 13 (in this fig., a horizontally arranged sample stand 30) vertical to an optical axis 12 is equal to or more than 20°, and in a yoke outer peripheral part 18, a boring part 17 is provided symmetrically relative to an axis at even portions; and a two-stage mirror aberration corrector in which an aberration corrector 32 has two pairs of mirror type aberration correctors coaxially faced and arranged.SELECTED DRAWING: Figure 3
【課題】バルク試料を観察できる高い空間分解能を有する光電子顕微鏡。【解決手段】対物レンズ６は、試料９に対面するヨーク円錐部１５の先端１３がリング形状（外径ｒ１、内径ｒ２）をなし、外形ｒ１は先端１３と試料９との距離ｇの３倍以上であって、光軸１２に垂直な面１３（この図では水平に配置された試料台３０）に対するヨーク円錐部１５との角度（円錐角）１４を２０°以上とし、ヨーク外周部１８に、穿孔部１７を軸対称に偶数箇所設けたことを特徴とする電場磁場重畳型であり、収差補正器３２は二組のミラー型収差補正器を同軸上に対面して配置したことを特徴とする二段ミラー収差補正器とから構成される。【選択図】図３ |
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【課題】バルク試料を観察できる高い空間分解能を有する光電子顕微鏡。【解決手段】対物レンズ６は、試料９に対面するヨーク円錐部１５の先端１３がリング形状（外径ｒ１、内径ｒ２）をなし、外形ｒ１は先端１３と試料９との距離ｇの３倍以上であって、光軸１２に垂直な面１３（この図では水平に配置された試料台３０）に対するヨーク円錐部１５との角度（円錐角）１４を２０°以上とし、ヨーク外周部１８に、穿孔部１７を軸対称に偶数箇所設けたことを特徴とする電場磁場重畳型であり、収差補正器３２は二組のミラー型収差補正器を同軸上に対面して配置したことを特徴とする二段ミラー収差補正器とから構成される。【選択図】図３</description><language>eng ; jpn</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ; ELECTRICITY ; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES ; MEASURING ; PHYSICS ; TESTING</subject><creationdate>2020</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20200604&DB=EPODOC&CC=JP&NR=2020085873A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20200604&DB=EPODOC&CC=JP&NR=2020085873A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>TSUNO KATSUSHIGE</creatorcontrib><creatorcontrib>MUTO MASAO</creatorcontrib><title>PHOTOEMISSION ELECTRON MICROSCOPE</title><description>To provide a photoemission electron microscope that has high spatial resolving power capable of observing a bulk sample.SOLUTION: A photoemission electron microscope is composed of: an objective lens 6 that is an electric field magnetic field overlapping type characterized in which a tip 13 of a yoke cone part 15 facing a sample 9 is shaped into a ring (an external diameter r1 and inner diameter r2), the external diameter r1 is more than three times a distance g between the tip 13 and sample 9, an angle (cone angle) 14 formed with the yoke cone part 15 with respect to a surface 13 (in this fig., a horizontally arranged sample stand 30) vertical to an optical axis 12 is equal to or more than 20°, and in a yoke outer peripheral part 18, a boring part 17 is provided symmetrically relative to an axis at even portions; and a two-stage mirror aberration corrector in which an aberration corrector 32 has two pairs of mirror type aberration correctors coaxially faced and arranged.SELECTED DRAWING: Figure 3
【課題】バルク試料を観察できる高い空間分解能を有する光電子顕微鏡。【解決手段】対物レンズ６は、試料９に対面するヨーク円錐部１５の先端１３がリング形状（外径ｒ１、内径ｒ２）をなし、外形ｒ１は先端１３と試料９との距離ｇの３倍以上であって、光軸１２に垂直な面１３（この図では水平に配置された試料台３０）に対するヨーク円錐部１５との角度（円錐角）１４を２０°以上とし、ヨーク外周部１８に、穿孔部１７を軸対称に偶数箇所設けたことを特徴とする電場磁場重畳型であり、収差補正器３２は二組のミラー型収差補正器を同軸上に対面して配置したことを特徴とする二段ミラー収差補正器とから構成される。【選択図】図３</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</subject><subject>ELECTRICITY</subject><subject>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</subject><subject>MEASURING</subject><subject>PHYSICS</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2020</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZFAM8PAP8Xf19QwO9vT3U3D1cXUOCQIyfD2dg_yDnf0DXHkYWNMSc4pTeaE0N4OSm2uIs4duakF-fGpxQWJyal5qSbxXgJGBkYGBhamFubGjMVGKAIPPIwM</recordid><startdate>20200604</startdate><enddate>20200604</enddate><creator>TSUNO KATSUSHIGE</creator><creator>MUTO MASAO</creator><scope>EVB</scope></search><sort><creationdate>20200604</creationdate><title>PHOTOEMISSION ELECTRON MICROSCOPE</title><author>TSUNO KATSUSHIGE ; MUTO MASAO</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JP2020085873A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; jpn</language><creationdate>2020</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</topic><topic>ELECTRICITY</topic><topic>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</topic><topic>MEASURING</topic><topic>PHYSICS</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>TSUNO KATSUSHIGE</creatorcontrib><creatorcontrib>MUTO MASAO</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>TSUNO KATSUSHIGE</au><au>MUTO MASAO</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>PHOTOEMISSION ELECTRON MICROSCOPE</title><date>2020-06-04</date><risdate>2020</risdate><abstract>To provide a photoemission electron microscope that has high spatial resolving power capable of observing a bulk sample.SOLUTION: A photoemission electron microscope is composed of: an objective lens 6 that is an electric field magnetic field overlapping type characterized in which a tip 13 of a yoke cone part 15 facing a sample 9 is shaped into a ring (an external diameter r1 and inner diameter r2), the external diameter r1 is more than three times a distance g between the tip 13 and sample 9, an angle (cone angle) 14 formed with the yoke cone part 15 with respect to a surface 13 (in this fig., a horizontally arranged sample stand 30) vertical to an optical axis 12 is equal to or more than 20°, and in a yoke outer peripheral part 18, a boring part 17 is provided symmetrically relative to an axis at even portions; and a two-stage mirror aberration corrector in which an aberration corrector 32 has two pairs of mirror type aberration correctors coaxially faced and arranged.SELECTED DRAWING: Figure 3
【課題】バルク試料を観察できる高い空間分解能を有する光電子顕微鏡。【解決手段】対物レンズ６は、試料９に対面するヨーク円錐部１５の先端１３がリング形状（外径ｒ１、内径ｒ２）をなし、外形ｒ１は先端１３と試料９との距離ｇの３倍以上であって、光軸１２に垂直な面１３（この図では水平に配置された試料台３０）に対するヨーク円錐部１５との角度（円錐角）１４を２０°以上とし、ヨーク外周部１８に、穿孔部１７を軸対称に偶数箇所設けたことを特徴とする電場磁場重畳型であり、収差補正器３２は二組のミラー型収差補正器を同軸上に対面して配置したことを特徴とする二段ミラー収差補正器とから構成される。【選択図】図３</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING |
| title | PHOTOEMISSION ELECTRON MICROSCOPE |
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