MICROCHIP INSPECTION METHOD AND MICROCHIP INSPECTION DEVICE

To provide a microchip inspection method with which it is possible to detect the presence of a weld line with high accuracy that affects inspection.SOLUTION: An inspection method for a flow channel chip that includes a main flow channel 2, a first electrode port 21 provided with a plurality of ports and a plurality of branch channels, the plurality of ports receiving supply of electric power and a second electrode port 26 for receiving supply of electric power differing in the polarity from this electric power is executed by an electric characteristic measurement step of measuring electric characteristics between the first electrode port 21 and the second electrode port 26 supplied with liquid phases having electrical conductivity and continuous to the main flow channel 2 blocked in at least one point, and an inspection step of inspecting the effects exerted on the flow channel chip by other flow channels except the main and branch flow channels, on the basis of the measured electric characteristics.SELECTED DRAWING: Figure 3 【課題】検査に影響を及ぼすウエルドラインの存在を高い精度で検出することが可能なマイクロチップの検査方法を提供する。【解決手段】主流路２、複数のポート及び複数の支流路を備え、複数のポートが電力の供給を受ける第一電極ポート２１と、この電力と極性の異なる電力の供給を受ける第二電極ポート２６と、を含む流路チップの検査方法を、電気伝導性を有する液相が供給され、かつ少なくとも一か所が閉塞された状態の主流路２と連通する第一電極ポート２１と第二電極ポート２６との間の電気特性を測定する電気特性測定工程と、測定された電気特性により、主流路及び支流路を除く他の流路が流路チップに与える影響を検査する検査工程と、により実行する。【選択図】図３