TIN SOLUTION FOR FORMING TIN FILM, AND METHOD OF FORMING TIN FILM USING THE SAME
To provide a tin solution available for forming a tin film using the solid phase electrodeposition method, and a method of forming the tin film using the solution.SOLUTION: A tin solution includes a tin methanesulfonate, a methanesulfonic acid, water, isopropyl alcohol, and polyethylene-block-poly (...
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Format: | Patent |
Sprache: | eng ; jpn |
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Zusammenfassung: | To provide a tin solution available for forming a tin film using the solid phase electrodeposition method, and a method of forming the tin film using the solution.SOLUTION: A tin solution includes a tin methanesulfonate, a methanesulfonic acid, water, isopropyl alcohol, and polyethylene-block-poly (ethylene glycol).SELECTED DRAWING: Figure 1
【課題】固相電析法によるスズ成膜に用いることができるスズ溶液、及びその溶液を用いたスズ膜の形成方法を提供する。【解決手段】スズ溶液は、メタンスルホン酸スズ、メタンスルホン酸、水、イソプロピルアルコール、及びポリエチレン−ブロック−ポリ(エチレングリコール)を含む。【選択図】図1 |
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