IMAGING APPARATUS

To reduce noise in an imaging apparatus having a pixel having an optical waveguide and a charge holding unit.SOLUTION: The imaging apparatus has a pixel region in which a plurality of pixels is arranged. Each of the pixels includes: a photoelectric conversion portion, a charge storage portion, a floating diffusion, a light-shielding portion that covers the charge storage portion and has an opening on the photoelectric conversion portion; and a waveguide that at least partially overlaps the opening of the light shielding portion in a plan view. A multilayer wiring structure is arranged on the pixel region. An insulating film is provided at a lower portion of the optical waveguide. The insulating film has a refractive index larger than that of an interlayer insulating film. The insulating film is arranged at a position closer to the photoelectric conversion portion than a lowermost wiring layer of a wiring layers of the multilayer wiring structure. The insulating film extends above the light-shielding portion. The insulating film has a larger area in plan view than the lower portion of the optical waveguide.SELECTED DRAWING: Figure 2 【課題】 光導波路と電荷保持部とを有する画素を有する撮像装置において、ノイズを低減させることを目的とする。【解決手段】 光電変換部と、電荷蓄積部と、フローティングディフュージョンと、電荷蓄積部を覆い、前記光電変換部上が開口された遮光部と、平面視において遮光部が開口された部分に少なくとも一部が重なる導波路と、を含む画素が複数配された画素領域を有し、画素領域上に多層配線構造が配された撮像装置であって、前記光導波路の下部に配された絶縁膜を備え、前記絶縁膜は層間絶縁膜より大きい屈折率を有し、前記絶縁膜は前記多層配線構造の配線層のうち最下層の配線層より光電変換部に近い位置に配され、前記絶縁膜は前記遮光部の上方に延在しており、前記絶縁膜は前記光導波路下部より平面視で面積が大きい。【選択図】 図２