MANUFACTURE METHOD OF SEMICONDUCTOR DEVICE

To suppress fluctuations in electrical characteristics and improve reliability in a semiconductor device having an oxide semiconductor film.SOLUTION: A semiconductor device having an oxide semiconductor film includes a gate electrode, a gate insulating film on the gate electrode, an oxide semiconduc...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KAMINAGA MASAMI, UBUNAI TOSHIMITSU, KUROSAKI DAISUKE, YAMAZAKI SHUNPEI, HIZUKA JUNICHI, NAKAZAWA YASUTAKA, OKAZAKI KENICHI, SHIMA YUKINORI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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