DEVICE AND METHOD OF PRODUCING RESIN FILM COATED WITH METAL FILM

To provide a device and a method of producing a resin film coated with a metal film, which metal film is formed on a metal seed layer by a wet plating method and hardly forms a pinhole.SOLUTION: The device of producing a resin film coated with a metal film, comprising a long resin film unwinding roller 600 whereon a long resin film 601 coated with a metal seed layer formed by a vacuum film forming method is wound while taking in a long interleaf 603 in between, a long interleaf winding roller 602 for winding the long interleaf being separated from the long resin film unwound from the unwinding roller 600, wet plating tanks 642 to 645 into which the long resin film removed of the long interleaf is introduced to form a metal film on the metal seed layer thereof, and a long resin film winding roller 641 for winding the long resin film whereon a metal film is formed, is characterized in that an atmospheric pressure plasma cleaning device for cleaning the surface of the metal seed layer of the long resin film removed of the long interleaf is provided between the unwinding roller 600 and the wet plating tanks.SELECTED DRAWING: Figure 4 【課題】湿式メッキ法で金属シード層上に形成される金属膜にピンホールが生じ難い金属膜付き樹脂フィルムの製造装置と製造方法を提供する。【解決手段】真空成膜法で金属シード層を成膜した長尺樹脂フィルム601が層間に長尺合紙603を挟み込みながら巻回された長尺樹脂フィルム巻出ロール600と、該巻出ロール600から巻き出される長尺樹脂フィルムから長尺合紙を分離して巻き取る長尺合紙巻取ロール602と、長尺合紙が分離された長尺樹脂フィルムを搬入しその金属シード層上に金属膜を形成する湿式メッキ槽642〜645と、金属膜が形成された長尺樹脂フィルムを巻き取る長尺樹脂フィルム巻取ロール641を備えた金属膜付き樹脂フィルムの製造装置において、長尺合紙が分離された長尺樹脂フィルムの金属シード層表面を洗浄する大気圧プラズマ洗浄装置が上記巻出ロール600と湿式メッキ槽との間に設けられていることを特徴とする。【選択図】図４