LINEAR MOTOR FOR VACUUM AND VACUUM PROCESSOR
To solve problems in which: wiring connected to a linear motor is drawn around the inside of a vacuum sample chamber, and therefore outgas generated from a wiring cover and assembly work efficiency are lowered; and a gap between a coil and a permanent magnet in the linear motor cannot be decreased,...
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| Format: | Patent |
| Sprache: | eng ; jpn |
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| Zusammenfassung: | To solve problems in which: wiring connected to a linear motor is drawn around the inside of a vacuum sample chamber, and therefore outgas generated from a wiring cover and assembly work efficiency are lowered; and a gap between a coil and a permanent magnet in the linear motor cannot be decreased, and thrust generation efficiency of the linear motor is lowered.SOLUTION: In order to solve the above-mentioned problem, in the linear motor for vacuum provided with a needle having the permanent magnet and a stator having a support member in which a coil is fixed, the support member has: a vacuum lock part that performs a vacuum lock in a gap with a wall surfaces of a vacuum sample chamber; and feedthrough for supplying electric current to the coil installed in the vacuum sample chamber.SELECTED DRAWING: Figure 1
【課題】リニアモータに接続する配線を真空試料室内で引廻すため、配線被覆から発生するアウトガスや組立作業効率が低下する課題があった。また、リニアモータのコイルと永久磁石との間のギャップを小さくできず、リニアモータの推力発生効率が低下するという課題があった。【解決手段】上記課題を解決するために、永久磁石を有する可動子と、コイルを固定した支持部材を有する固定子とを具備する真空用リニアモータにおいて、支持部材は、真空試料室の壁面との間で真空封止する真空封止部と、真空試料室内に設置されたコイルに対して電流を供給するためのフィードスルーを有することを特徴とする真空用リニアモータを提案する。【選択図】図１ |
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