MEASUREMENT METHOD AND MEASUREMENT DEVICE

To provide a measurement method and a measurement device capable of quickly measuring the shape of a measurement surface of a specimen.SOLUTION: A measurement method using a confocal optical system 20 includes the steps of condensing reflection light 12 reflected on a measurement surface 51 of a spe...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KUSUSE HARUHIKO, TORISAWA MAKOTO
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS TESTING
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