THERMAL HEAD AND MANUFACTURING METHOD OF THERMAL HEAD

To achieve a thermal head having excellent durability, in which a protective film covering a heat element is prevented from being peeled.SOLUTION: A thermal head includes: a heat element 16 arranged on a substrate 10; an electrode 13 that supplies power to the heat element 16; a first protective fil...

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Hauptverfasser: ONISHI NORIAKI, YAMAJI NORIO
Format: Patent
Sprache:eng ; jpn
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Zusammenfassung:To achieve a thermal head having excellent durability, in which a protective film covering a heat element is prevented from being peeled.SOLUTION: A thermal head includes: a heat element 16 arranged on a substrate 10; an electrode 13 that supplies power to the heat element 16; a first protective film 17 that has an insulation property, is arranged on the substrate 10, covers the heat element 16, and covers at least a part of the electrode 13; and a second protective film 19 arranged above the first protective film 17. An internal stress of the second protective film 19 is higher in a side close to the first protective film 17 than a side far from the first protective film 17.SELECTED DRAWING: Figure 1 【課題】発熱抵抗体を覆う保護膜の剥離を防止し、耐久性に優れたサーマルヘッドを実現する。【解決手段】サーマルヘッドは、基板10上に配置されている発熱抵抗体16と、発熱抵抗体16に電力を供給する電極13と、基板10上に配置され、発熱抵抗体16を覆うとともに、電極13の少なくとも一部を覆う絶縁性の第1保護膜17と、第1保護膜17より上に配置される第2保護膜19とを備え、第2保護膜19の内部応力は、第1保護膜17から遠い側において、第1保護膜17に近い側よりも高い。【選択図】図1