IMAGING APPARATUS
To provide an imaging apparatus that can prevent a dark current.SOLUTION: An imaging apparatus according to one aspect of the present disclosure comprises a semiconductor substrate 60 and pixels 10. The semiconductor substrate 60 includes a first surface, a second surface that is on an opposite side...
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Zusammenfassung: | To provide an imaging apparatus that can prevent a dark current.SOLUTION: An imaging apparatus according to one aspect of the present disclosure comprises a semiconductor substrate 60 and pixels 10. The semiconductor substrate 60 includes a first surface, a second surface that is on an opposite side of the first surface, a support substrate 61 that is one example of a first area including an impurity of a first conductivity type, an n-type semiconductor layer 62n that is one example of a second area including an impurity of a second conductivity type and closer to the first surface than the first area, a p-type semiconductor layer 65p that is one example of a third area including an impurity of the first conductivity type and closer to the first surface than the second area, and a p-type area 66p that is one example of a fourth area penetrating the second area, connecting the first area with the third area, and including an impurity of the first conductivity type. The pixels 10 each include a photoelectric conversion part 12, and an electric charge storage area 67n that is one example of a first diffusion area being electrically connected to the photoelectric conversion part 12, including an impurity of the second conductivity type, located in the third area, and exposed to the first surface. In plan view, the fourth area overlaps an entirety of the first diffusion area.SELECTED DRAWING: Figure 3
【課題】暗電流を抑制することができる撮像装置を提供する。【解決手段】本開示の一態様に係る撮像装置は、半導体基板60と画素10とを備える。半導体基板60は、第1面と、第1面とは反対側の第2面と、第1導電型の不純物を含む第1領域の一例である支持基板61と、第2導電型の不純物を含み、第1領域よりも第1面に近い第2領域の一例であるn型半導体層62nと、第1導電型の不純物を含み、第2領域よりも第1面に近い第3領域の一例であるp型半導体層65pと、第2領域を貫通し、第1領域と第3領域とを接続する、第1導電型の不純物を含む第4領域の一例であるp型領域66pと、を含む。画素10は、光電変換部12と、光電変換部12に電気的に接続され、第2導電型の不純物を含み、第3領域内に位置し、第1面に露出した第1拡散領域の一例である電荷蓄積領域67nと、を含む。平面視において、第4領域は第1拡散領域の全体と重なっている。【選択図】図3 |
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