VACUUM GATE VALVE

To provide a vacuum gate valve in which friction between a seal material and a seal surface is suppressed compactly with minimum driving force, to enable stable and reliable opening/closing operation even under low particle and high speed driving, impact noise and vibration are limited as much as po...

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Bibliographische Detailangaben
1. Verfasser: IWABUCHI TOSHIAKI
Format: Patent
Sprache:eng ; jpn
Schlagworte:
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