VACUUM GATE VALVE

To provide a vacuum gate valve in which friction between a seal material and a seal surface is suppressed compactly with minimum driving force, to enable stable and reliable opening/closing operation even under low particle and high speed driving, impact noise and vibration are limited as much as possible, and further durability is good.SOLUTION: A vacuum gate valve comprises housing bodies arranged oppositely, a valve body opening/closing drive body that is arranged between the housing bodies and performs vertical movement and L-shaped movement, and a stem with a valve body on its top. In each housing body, a piston rod that moves vertically by a cylinder mechanism, and a cam member with a cam groove at its upper end, are provided. On both sides of the valve body opening/closing drive body, a cam roller and a fulcrum roller that are slidably guided in the cam groove, are provided. Inside the housing body, a vertical movement guide part that guides the vertical movement of the fulcrum roller and a stopper part that locks the rising of the valve body opening/closing drive body, are provided. Between the valve body opening/closing drive body and a stationary side base part, a spring that raises the valve body opening/closing drive body to the upper end of an opening stroke, is provided.SELECTED DRAWING: Figure 1 【課題】コンパクトで最小駆動力でシール材とシール面との摩擦を抑制し低パーティクルかつ高速駆動下でも開閉動作が安定確実であり、衝撃音や振動を極力制限し耐久性も良い真空用ゲートバルブを提供する。【解決手段】対向配置したハウジング体とハウジング体の間に配置され上下動作とＬモーション動作を行う弁体開閉駆動体とその上部に弁体を設けたステムとを備え各ハウジング体内にはシリンダ機構で上下動するピストンロッドとその上端にカム溝を有するカム部材を有し弁体開閉駆動体の両側にはカム溝に摺動可能に案内されるカムローラと支点ローラとを有しハウジング体の内側には支点ローラの上下動を案内する上下動案内部と弁体開閉駆動体の上昇を係止するストッパ部とを有し弁体開閉駆動体と固定側基部との間に弁体開閉駆動体を開口ストロークの上端まで上昇させるスプリングを備えた真空用ゲートバルブである。【選択図】 図１