VACUUM GATE VALVE

To provide a vacuum gate valve in which friction between a seal material and a seal surface is suppressed compactly with minimum driving force, to enable stable and reliable opening/closing operation even under low particle and high speed driving, impact noise and vibration are limited as much as po...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: IWABUCHI TOSHIAKI
Format: Patent
Sprache:eng ; jpn
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue
container_start_page
container_title
container_volume
creator IWABUCHI TOSHIAKI
description To provide a vacuum gate valve in which friction between a seal material and a seal surface is suppressed compactly with minimum driving force, to enable stable and reliable opening/closing operation even under low particle and high speed driving, impact noise and vibration are limited as much as possible, and further durability is good.SOLUTION: A vacuum gate valve comprises housing bodies arranged oppositely, a valve body opening/closing drive body that is arranged between the housing bodies and performs vertical movement and L-shaped movement, and a stem with a valve body on its top. In each housing body, a piston rod that moves vertically by a cylinder mechanism, and a cam member with a cam groove at its upper end, are provided. On both sides of the valve body opening/closing drive body, a cam roller and a fulcrum roller that are slidably guided in the cam groove, are provided. Inside the housing body, a vertical movement guide part that guides the vertical movement of the fulcrum roller and a stopper part that locks the rising of the valve body opening/closing drive body, are provided. Between the valve body opening/closing drive body and a stationary side base part, a spring that raises the valve body opening/closing drive body to the upper end of an opening stroke, is provided.SELECTED DRAWING: Figure 1 【課題】コンパクトで最小駆動力でシール材とシール面との摩擦を抑制し低パーティクルかつ高速駆動下でも開閉動作が安定確実であり、衝撃音や振動を極力制限し耐久性も良い真空用ゲートバルブを提供する。【解決手段】対向配置したハウジング体とハウジング体の間に配置され上下動作とLモーション動作を行う弁体開閉駆動体とその上部に弁体を設けたステムとを備え各ハウジング体内にはシリンダ機構で上下動するピストンロッドとその上端にカム溝を有するカム部材を有し弁体開閉駆動体の両側にはカム溝に摺動可能に案内されるカムローラと支点ローラとを有しハウジング体の内側には支点ローラの上下動を案内する上下動案内部と弁体開閉駆動体の上昇を係止するストッパ部とを有し弁体開閉駆動体と固定側基部との間に弁体開閉駆動体を開口ストロークの上端まで上昇させるスプリングを備えた真空用ゲートバルブである。【選択図】 図1
format Patent
fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_JP2020056498A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>JP2020056498A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_JP2020056498A3</originalsourceid><addsrcrecordid>eNrjZBAMc3QODfVVcHcMcVUIc_QJc-VhYE1LzClO5YXS3AxKbq4hzh66qQX58anFBYnJqXmpJfFeAUYGRgYGpmYmlhaOxkQpAgBQgR4k</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>VACUUM GATE VALVE</title><source>esp@cenet</source><creator>IWABUCHI TOSHIAKI</creator><creatorcontrib>IWABUCHI TOSHIAKI</creatorcontrib><description>To provide a vacuum gate valve in which friction between a seal material and a seal surface is suppressed compactly with minimum driving force, to enable stable and reliable opening/closing operation even under low particle and high speed driving, impact noise and vibration are limited as much as possible, and further durability is good.SOLUTION: A vacuum gate valve comprises housing bodies arranged oppositely, a valve body opening/closing drive body that is arranged between the housing bodies and performs vertical movement and L-shaped movement, and a stem with a valve body on its top. In each housing body, a piston rod that moves vertically by a cylinder mechanism, and a cam member with a cam groove at its upper end, are provided. On both sides of the valve body opening/closing drive body, a cam roller and a fulcrum roller that are slidably guided in the cam groove, are provided. Inside the housing body, a vertical movement guide part that guides the vertical movement of the fulcrum roller and a stopper part that locks the rising of the valve body opening/closing drive body, are provided. Between the valve body opening/closing drive body and a stationary side base part, a spring that raises the valve body opening/closing drive body to the upper end of an opening stroke, is provided.SELECTED DRAWING: Figure 1 【課題】コンパクトで最小駆動力でシール材とシール面との摩擦を抑制し低パーティクルかつ高速駆動下でも開閉動作が安定確実であり、衝撃音や振動を極力制限し耐久性も良い真空用ゲートバルブを提供する。【解決手段】対向配置したハウジング体とハウジング体の間に配置され上下動作とLモーション動作を行う弁体開閉駆動体とその上部に弁体を設けたステムとを備え各ハウジング体内にはシリンダ機構で上下動するピストンロッドとその上端にカム溝を有するカム部材を有し弁体開閉駆動体の両側にはカム溝に摺動可能に案内されるカムローラと支点ローラとを有しハウジング体の内側には支点ローラの上下動を案内する上下動案内部と弁体開閉駆動体の上昇を係止するストッパ部とを有し弁体開閉駆動体と固定側基部との間に弁体開閉駆動体を開口ストロークの上端まで上昇させるスプリングを備えた真空用ゲートバルブである。【選択図】 図1</description><language>eng ; jpn</language><subject>ACTUATING-FLOATS ; BLASTING ; COCKS ; DEVICES FOR VENTING OR AERATING ; ENGINEERING ELEMENTS AND UNITS ; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS ; HEATING ; LIGHTING ; MECHANICAL ENGINEERING ; TAPS ; THERMAL INSULATION IN GENERAL ; VALVES ; WEAPONS</subject><creationdate>2020</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20200409&amp;DB=EPODOC&amp;CC=JP&amp;NR=2020056498A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76290</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20200409&amp;DB=EPODOC&amp;CC=JP&amp;NR=2020056498A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>IWABUCHI TOSHIAKI</creatorcontrib><title>VACUUM GATE VALVE</title><description>To provide a vacuum gate valve in which friction between a seal material and a seal surface is suppressed compactly with minimum driving force, to enable stable and reliable opening/closing operation even under low particle and high speed driving, impact noise and vibration are limited as much as possible, and further durability is good.SOLUTION: A vacuum gate valve comprises housing bodies arranged oppositely, a valve body opening/closing drive body that is arranged between the housing bodies and performs vertical movement and L-shaped movement, and a stem with a valve body on its top. In each housing body, a piston rod that moves vertically by a cylinder mechanism, and a cam member with a cam groove at its upper end, are provided. On both sides of the valve body opening/closing drive body, a cam roller and a fulcrum roller that are slidably guided in the cam groove, are provided. Inside the housing body, a vertical movement guide part that guides the vertical movement of the fulcrum roller and a stopper part that locks the rising of the valve body opening/closing drive body, are provided. Between the valve body opening/closing drive body and a stationary side base part, a spring that raises the valve body opening/closing drive body to the upper end of an opening stroke, is provided.SELECTED DRAWING: Figure 1 【課題】コンパクトで最小駆動力でシール材とシール面との摩擦を抑制し低パーティクルかつ高速駆動下でも開閉動作が安定確実であり、衝撃音や振動を極力制限し耐久性も良い真空用ゲートバルブを提供する。【解決手段】対向配置したハウジング体とハウジング体の間に配置され上下動作とLモーション動作を行う弁体開閉駆動体とその上部に弁体を設けたステムとを備え各ハウジング体内にはシリンダ機構で上下動するピストンロッドとその上端にカム溝を有するカム部材を有し弁体開閉駆動体の両側にはカム溝に摺動可能に案内されるカムローラと支点ローラとを有しハウジング体の内側には支点ローラの上下動を案内する上下動案内部と弁体開閉駆動体の上昇を係止するストッパ部とを有し弁体開閉駆動体と固定側基部との間に弁体開閉駆動体を開口ストロークの上端まで上昇させるスプリングを備えた真空用ゲートバルブである。【選択図】 図1</description><subject>ACTUATING-FLOATS</subject><subject>BLASTING</subject><subject>COCKS</subject><subject>DEVICES FOR VENTING OR AERATING</subject><subject>ENGINEERING ELEMENTS AND UNITS</subject><subject>GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS</subject><subject>HEATING</subject><subject>LIGHTING</subject><subject>MECHANICAL ENGINEERING</subject><subject>TAPS</subject><subject>THERMAL INSULATION IN GENERAL</subject><subject>VALVES</subject><subject>WEAPONS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2020</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZBAMc3QODfVVcHcMcVUIc_QJc-VhYE1LzClO5YXS3AxKbq4hzh66qQX58anFBYnJqXmpJfFeAUYGRgYGpmYmlhaOxkQpAgBQgR4k</recordid><startdate>20200409</startdate><enddate>20200409</enddate><creator>IWABUCHI TOSHIAKI</creator><scope>EVB</scope></search><sort><creationdate>20200409</creationdate><title>VACUUM GATE VALVE</title><author>IWABUCHI TOSHIAKI</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JP2020056498A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; jpn</language><creationdate>2020</creationdate><topic>ACTUATING-FLOATS</topic><topic>BLASTING</topic><topic>COCKS</topic><topic>DEVICES FOR VENTING OR AERATING</topic><topic>ENGINEERING ELEMENTS AND UNITS</topic><topic>GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS</topic><topic>HEATING</topic><topic>LIGHTING</topic><topic>MECHANICAL ENGINEERING</topic><topic>TAPS</topic><topic>THERMAL INSULATION IN GENERAL</topic><topic>VALVES</topic><topic>WEAPONS</topic><toplevel>online_resources</toplevel><creatorcontrib>IWABUCHI TOSHIAKI</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>IWABUCHI TOSHIAKI</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>VACUUM GATE VALVE</title><date>2020-04-09</date><risdate>2020</risdate><abstract>To provide a vacuum gate valve in which friction between a seal material and a seal surface is suppressed compactly with minimum driving force, to enable stable and reliable opening/closing operation even under low particle and high speed driving, impact noise and vibration are limited as much as possible, and further durability is good.SOLUTION: A vacuum gate valve comprises housing bodies arranged oppositely, a valve body opening/closing drive body that is arranged between the housing bodies and performs vertical movement and L-shaped movement, and a stem with a valve body on its top. In each housing body, a piston rod that moves vertically by a cylinder mechanism, and a cam member with a cam groove at its upper end, are provided. On both sides of the valve body opening/closing drive body, a cam roller and a fulcrum roller that are slidably guided in the cam groove, are provided. Inside the housing body, a vertical movement guide part that guides the vertical movement of the fulcrum roller and a stopper part that locks the rising of the valve body opening/closing drive body, are provided. Between the valve body opening/closing drive body and a stationary side base part, a spring that raises the valve body opening/closing drive body to the upper end of an opening stroke, is provided.SELECTED DRAWING: Figure 1 【課題】コンパクトで最小駆動力でシール材とシール面との摩擦を抑制し低パーティクルかつ高速駆動下でも開閉動作が安定確実であり、衝撃音や振動を極力制限し耐久性も良い真空用ゲートバルブを提供する。【解決手段】対向配置したハウジング体とハウジング体の間に配置され上下動作とLモーション動作を行う弁体開閉駆動体とその上部に弁体を設けたステムとを備え各ハウジング体内にはシリンダ機構で上下動するピストンロッドとその上端にカム溝を有するカム部材を有し弁体開閉駆動体の両側にはカム溝に摺動可能に案内されるカムローラと支点ローラとを有しハウジング体の内側には支点ローラの上下動を案内する上下動案内部と弁体開閉駆動体の上昇を係止するストッパ部とを有し弁体開閉駆動体と固定側基部との間に弁体開閉駆動体を開口ストロークの上端まで上昇させるスプリングを備えた真空用ゲートバルブである。【選択図】 図1</abstract><oa>free_for_read</oa></addata></record>
fulltext fulltext_linktorsrc
identifier
ispartof
issn
language eng ; jpn
recordid cdi_epo_espacenet_JP2020056498A
source esp@cenet
subjects ACTUATING-FLOATS
BLASTING
COCKS
DEVICES FOR VENTING OR AERATING
ENGINEERING ELEMENTS AND UNITS
GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS
HEATING
LIGHTING
MECHANICAL ENGINEERING
TAPS
THERMAL INSULATION IN GENERAL
VALVES
WEAPONS
title VACUUM GATE VALVE
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-03T01%3A02%3A30IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=IWABUCHI%20TOSHIAKI&rft.date=2020-04-09&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EJP2020056498A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true