POLISHING COMPOSITION, KIT FOR PREPARING POLISHING COMPOSITION, AND MANUFACTURING METHOD OF MAGNETIC DISK SUBSTRATE
To provide a polishing composition capable of facilitating detecting minute defects of a magnetic disk substrate after polishing at good accuracy, a kit for preparing the polishing composition used for preparing the polishing composition, and a manufacturing method of the magnetic disk substrate by...
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Format: | Patent |
Sprache: | eng ; jpn |
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Zusammenfassung: | To provide a polishing composition capable of facilitating detecting minute defects of a magnetic disk substrate after polishing at good accuracy, a kit for preparing the polishing composition used for preparing the polishing composition, and a manufacturing method of the magnetic disk substrate by using the polishing composition.SOLUTION: There is provided a polishing composition used in a finish polishing process of a magnetic disk substrate, containing an abrasive grain dispersion in which an abrasive grain is dispersed in water, the abrasive grain contains a silica particle, and a relationship between most frequent diameter in a grain size distribution based on the number of the abrasive grain (D) and 95% cumulative diameter from a small diameter side (D) satisfies the following relational expression. 1.14≤(D/D) |
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