SUBSTRATE ADSORPTION FIXED STAGE AND BALL MOUNTING DEVICE

To provide a stable ball mounting that prevents warpage and deformation of a ball array mask without excess or shortage, and a substrate adsorption fixed stage that does not require a large driving stroke for separating a plate.SOLUTION: A substrate adsorption fixed stage includes a first plate 52 having a vacuum suction hole 55 for sucking a substrate 14, and in which a plurality of magnetic portions A and B are alternately arranged and fixed with a gap in one plane direction, a second plate 53 that is disposed on the side opposite to a ball arranging mask 11 of the first plate 52, and in which each of the plurality of magnetic portions C is arranged and fixed at a position facing each of the plurality of magnetic portions A on a flat plate magnet 57, and an actuator 60 that moves the second plate 53 in parallel with first plate 52 to a position where the magnetic portion C overlaps the magnetic portion A, and a position where the magnetic portion C is separated from the magnetic portion A in the plane direction and is close to the magnetic portion B.SELECTED DRAWING: Figure 3 【課題】ボール配列用マスクの反りや変形を防ぎ、過不足のない安定したボール搭載と、版離れに大きな駆動ストロークを必要としない基板吸着固定ステージを提供すること。【解決手段】基板１４を吸着するための真空吸引孔５５を有し、複数の磁性体部Ａ及び磁性体部Ｂが平面一方向に隙間を有して交互に配列固定される第1プレート５２と、第1プレート５２のボール配列用マスク１１に対して反対面側に配置されており、平板のマグネット５７に複数の磁性体部Ｃの各々が複数の磁性体部Ａの一つひとつと対向する位置に配列固定される第２プレート５３と、磁性体部Ｃが磁性体部Ａに重なる位置と、磁性体部Ｃが平面方向に磁性体部Ａから離れ、かつ磁性体部Ｂに近接する位置と、に第２プレート５３を第1プレート５２に対して平行に移動するアクチュエータ６０と、を有する基板吸着固定ステージ。【選択図】図３