LASER TYPE GAS ANALYZER
To provide a laser type gas analyzer capable of measuring the concentration of gas to be measured with high accuracy and high stability while reducing the effect of pressure or fluctuation of other gas components.SOLUTION: A laser type gas analyzer includes a light receiving part having a light rece...
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| Format: | Patent |
| Sprache: | eng ; jpn |
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| Zusammenfassung: | To provide a laser type gas analyzer capable of measuring the concentration of gas to be measured with high accuracy and high stability while reducing the effect of pressure or fluctuation of other gas components.SOLUTION: A laser type gas analyzer includes a light receiving part having a light receiving signal processing part which performs gas analysis on a gas absorption signal received from a light receiving element based on a measurement waveform obtained by lock-in detection at the fundamental frequency or harmonic frequency of wavelength modulation of laser light. In the light receiving signal processing part, the fitting parameter of a comparative waveform is determined so that an error between the preset comparative waveform and the measured waveform is small, and based on the determined fitting parameter, concentration of target gas is calculated.SELECTED DRAWING: Figure 1
【課題】圧力または他のガス成分の変動の影響を低減しつつ、高精度かつ高安定に測定対象ガス濃度を測定することができるレーザ式ガス分析計を提供する。【解決手段】レーザ式ガス分析計は、受光素子から受信したガス吸収信号に対し、レーザ光の波長変調の基本周波数または高調波周波数でロックイン検出して得た測定波形に基づいてガス分析を行う受光信号処理部を有する受光部を備え、受光信号処理部は、予め設定された比較用波形と測定波形との間の誤差が小さくなるように比較用波形のフィッティングパラメータを決定し、決定されたフィッティングパラメータに基づいて、対象ガスの濃度を算出する。【選択図】図１ |
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