PIEZOELECTRIC ACTUATOR AND VALVE
To easily realize a configuration capable of generating a larger displacement or force with a lower applied voltage.SOLUTION: A piezoelectric actuator has a configuration in which a first piezoelectric element 10 is disposed on a shim plate 40 and a second piezoelectric element 20 is disposed on the...
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Zusammenfassung: | To easily realize a configuration capable of generating a larger displacement or force with a lower applied voltage.SOLUTION: A piezoelectric actuator has a configuration in which a first piezoelectric element 10 is disposed on a shim plate 40 and a second piezoelectric element 20 is disposed on the first piezoelectric element 10. The first piezoelectric element 10 has a first polarity on the first electrode 14 side and a second polarity on the second electrode 16 side, and the second piezoelectric element 20 has a second polarity on the third electrode 24 side, and a first polarity on the four electrode 26 side. In the first piezoelectric element 10 and the second piezoelectric element 20, the second electrode 16 and the third electrode 24 are joined to each other, and are electrically connected to each other, and the first electrode 14 is joined to one main surface 41 of the shim plate 40.SELECTED DRAWING: Figure 3
【課題】より低い印加電圧で、より大きな変位又は力を生じさせ得る構成を、簡易に実現する。【解決手段】圧電アクチュエータは、シム板40上に第1圧電素子10が配置され、第1圧電素子10上に第2圧電素子20が配置された構成をなす。第1圧電素子10は、第1電極14側が第1極性とされ、第2電極16側が第2極性とされており、第2圧電素子20は、第3電極24側が第2極性とされ、第4電極26側が第1極性とされている。第1圧電素子10及び第2圧電素子20において、第2電極16と第3電極24とが互いに接合され、且つ、互いに電気的に接続されており、シム板40の一方の主面41に第1電極14が接合されている。【選択図】図3 |
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