METAL-CLAD LAMINATE AND PATTERNED METAL-CLAD LAMINATE

To provide a metal-clad laminate high in dimensional stability before and after etching, and having suppressed generation of waving, while setting heat expansion coefficient CTEof a polyimide layer smaller than heat expansion coefficient CTEof the metal layer.SOLUTION: A metal-clad laminate having a...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: ANDO TOMONORI, HIRAISHI KATSUFUMI
Format: Patent
Sprache:eng ; jpn
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:To provide a metal-clad laminate high in dimensional stability before and after etching, and having suppressed generation of waving, while setting heat expansion coefficient CTEof a polyimide layer smaller than heat expansion coefficient CTEof the metal layer.SOLUTION: A metal-clad laminate having a polyimide layer and a metal layer laminated on at least one surface of the polyimide layer, realizing (i) thickness of the polyimide layer is in a range of 1 to 15 μm, (ii) the polyimide layer contains a non-thermoplastic polyimide layer, and glass transition temperature Tg of non-thermoplastic polyimide constituting the non-thermoplastic polyimide layer is 330°C or less, and (iii) heat expansion coefficient of the polyimide layer CTEand heat expansion coefficient of the metal layer CTEhas a relationship of the following formula (a). 2 ppm/K≤CTE-CTE≤8 ppm/K (a).SELECTED DRAWING: None 【課題】 金属層の熱膨張係数CTEMよりもポリイミド層の熱膨張係数CTEPを小さく設定しながら、エッチング前後の寸法安定性が高く、うねりの発生が抑制された金属張積層板を提供する。【解決手段】 ポリイミド層と、該ポリイミド層の少なくとも一方の面に積層された金属層を備えた金属張積層板は、(i)ポリイミド層の厚みが1〜15μmの範囲内であること、(ii)ポリイミド層は、非熱可塑性ポリイミド層を含んでおり、該非熱可塑性ポリイミド層を構成する非熱可塑性ポリイミドのガラス転移温度Tgが330℃以下であること、(iii)ポリイミド層の熱膨張係数CTEPと、金属層の熱膨張係数CTEMとが、次の式(a)の関係であること、2ppm/K≦CTEM−CTEP≦8ppm/K ... (a)を具備する。【選択図】なし