CAPACITOR AND METHOD FOR MANUFACTURING CAPACITOR
To provide a capacitor provided with a dielectric layer with high insulation resistance and having a high-dielectric constant.SOLUTION: A thin film capacitor 1 includes a base material 10, a first electrode layer 22 composed of Tin provided in the base material, a dielectric layer 21 made of zirconi...
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Format: | Patent |
Sprache: | eng ; jpn |
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Zusammenfassung: | To provide a capacitor provided with a dielectric layer with high insulation resistance and having a high-dielectric constant.SOLUTION: A thin film capacitor 1 includes a base material 10, a first electrode layer 22 composed of Tin provided in the base material, a dielectric layer 21 made of zirconia of a cubic system provided on the first electrode layer as a primary component, and a second electrode layer 23 provided on the dielectric layer. Strength of a peak appearing at a position of a diffraction angle 36.1° to 37.1° is larger than strength of a diffraction peak appearing at a diffraction angles 42.1° to 43.1° in an X-ray diffraction pattern by a CuKα ray of the first electrode layer.SELECTED DRAWING: Figure 2
【課題】絶縁耐性が高く高誘電率を有する誘電体層を備えるキャパシタを提供する。【解決手段】薄膜キャパシタ1は、基材10と、基材に設けられたTiNから成る第1電極層22と、第1電極層の上に設けられた立方晶系のジルコニアを主成分とする誘電体層21と、誘電体層の上に設けられた第2電極層23と、を備える。第1電極層のCuKα線によるX線回折パターンにおいて、回折角36.1°〜37.1°の位置に現れるピークの強度は、回折角42.1°〜43.1°に現れる回折ピークの強度よりも大きい。【選択図】図2 |
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