FOREIGN MATTER DETECTION DEVICE AND FOREIGN MATTER DETECTION METHOD

To provide a foreign matter detection device capable of accurately detecting foreign matter according to the type of an object to be inspected or foreign matter.SOLUTION: A foreign matter detection device 20 has: a plurality of photon detection type X-ray sensors 31to 31that outputs a pulse signal of a peak value corresponding to the energy of a photon each time an X-ray photon is input; and transmission image data generation means 40 that determines whether the peak value of each pulse signal falls in any of a plurality of areas obtained by dividing a predetermined range in advance, and using data generated from a result of accumulating the number of pulse signal inputs for each area, and generates a plurality of transmission image data that is a combination of regions optimal for detection of foreign matter with respect to an object to be inspected W.SELECTED DRAWING: Figure 1 【課題】被検査物や異物の種類に応じて異物検出を精度よく行うことができる異物検出装置を提供する。【解決手段】異物検出装置２０は、Ｘ線の光子が入力される毎に光子のエネルギーに対応した波高値のパルス信号を出力する光子検出型の複数のＸ線センサ３１１〜３１Ｎと、各パルス信号の波高値が、予め所定範囲内を複数に区分けした領域のいずれに入るかを判定し、パルス信号入力数を前記領域毎に累積した結果から生成しておいたデータを用いて、前記被検査物Ｗについて異物の検出に最適な領域の組合せとなる複数の透過画像データを生成する透過画像データ生成手段４０とを有している。【選択図】図１