TEMPERATURE SENSOR AND TEMPERATURE MEASUREMENT DEVICE
To provide a thin film temperature sensor using an electric resistance temperature dependency of a vanadium oxohydroxide (HVO) thin film, and provide a temperature measurement device using the temperature sensor.SOLUTION: In a temperature sensor of the present invention, two electrodes for measuring...
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| Format: | Patent |
| Sprache: | eng ; jpn |
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| Zusammenfassung: | To provide a thin film temperature sensor using an electric resistance temperature dependency of a vanadium oxohydroxide (HVO) thin film, and provide a temperature measurement device using the temperature sensor.SOLUTION: In a temperature sensor of the present invention, two electrodes for measuring the electric resistance value of a thin film at separate positions of the thin film of a vanadium oxohydroxide (HVO) formed on a substrate. Then, the temperature sensor of the present invention tightly adheres to an object having a curved surface shape and can simultaneously and accurately measure the temperatures of the object surface of them, by setting the substrate as a flexible film substrate.SELECTED DRAWING: Figure 1
【課題】バナジウムオキソ水酸化物（Ｈ２Ｖ３Ｏ８）薄膜の電気抵抗温度依存性を利用した薄膜温度センサー及び前記温度繊センサーを用いた温度測定装置の提供。【解決手段】本発明の温度センサーは、基材上に形成したバナジウムオキソ水酸化物（Ｈ２Ｖ３Ｏ８）の薄膜の離れた位置に薄膜の電気抵抗値を測定する２つの電極を配置したことを特徴とする。そして、本発明の温度センサーは、前記基材をフレキシブルなフィルム基材にすることにより、曲面形状を有する対象物に密着し、これらの対象物表面の温度を同時に高精度で測定することが可能である。【選択図】 図1 |
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