METHOD OF MANUFACTURING DISPLAY DEVICE, AND DISPLAY DEVICE

To improve the reliability of a display device having an organic EL element.SOLUTION: A method of manufacturing a display device having an organic EL element includes the steps of: forming an organic EL element on a substrate 11 consisting of a flexible substrate; and forming a protection film 16 fo...

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Hauptverfasser:	WASHIO YOSHIAKI, MATSUMOTO TATSUYA
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	ADVERTISING BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CRYPTOGRAPHY DIFFUSION TREATMENT OF METALLIC MATERIAL DISPLAY DISPLAYING EDUCATION ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL LABELS OR NAME-PLATES METALLURGY PHYSICS SEALS SEMICONDUCTOR DEVICES SIGNS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	To improve the reliability of a display device having an organic EL element.SOLUTION: A method of manufacturing a display device having an organic EL element includes the steps of: forming an organic EL element on a substrate 11 consisting of a flexible substrate; and forming a protection film 16 formed of an inorganic insulation material so as to cover the organic EL element. The step of forming the protection film 16 includes the steps of: forming an insulating film 16a so as to cover the organic EL element by using a remote plasma ALD method; and forming an insulating film 16b on the insulating film 16a by using a direct plasma ALD method. The protection film 16 is formed by a lamination film consisting of the insulating film 16a and the insulating film 16b. The insulating film 16a and the insulating film 16b have the same constituent element as each other.SELECTED DRAWING: Figure 3 【課題】有機ＥＬ素子を有する表示装置の信頼性を向上させる。【解決手段】有機ＥＬ素子を有する表示装置の製造方法は、フレキシブル基板からなる基板１１上に有機ＥＬ素子を形成する工程と、有機ＥＬ素子を覆うように、無機絶縁材料からなる保護膜１６を形成する工程と、を含む。保護膜１６を形成する工程は、有機ＥＬ素子を覆うように、絶縁膜１６ａをリモートプラズマＡＬＤ法を用いて形成する工程と、絶縁膜１６ａ上に絶縁膜１６ｂをダイレクトプラズマＡＬＤ法を用いて形成する工程と、を有する。絶縁膜１６ａおよび絶縁膜１６ｂからなる積層膜により、保護膜１６が形成され、絶縁膜１６ａと絶縁膜１６ｂとは、構成元素が互いに同じである。【選択図】図３