X-RAY INSPECTION DEVICE

To provide an X-ray inspection device with which an X-ray leakage is low and an X-ray from an X-ray irradiation unit appropriately reaches an X-ray line sensor.SOLUTION: An X-ray inspection device 1 comprises an X-ray irradiation unit 7, an X-ray line sensor in which detection elements are juxtaposed in a direction Z, a collimator 8 provided with a slit 8a, a first actuator 9 for moving the X-ray irradiation unit 7, a second actuator 11 for moving the collimator in a rotation direction B around the center line C of the slit as the axis of rotation, and a control unit 5. The control unit 5 drives the first actuator and determines the position of the X-ray irradiation unit in a direction X where the average of X-ray detection amounts is highest (Fig. 3), and then drives the second actuator and determines the position of the collimator so that the longitudinal direction of the slit and the juxtaposition direction of detection elements of the X-ray line sensor are parallel.SELECTED DRAWING: Figure 2 【課題】Ｘ線漏洩量が低く、Ｘ線照射部からのＸ線が適正にＸ線ラインセンサに到達するＸ線検査装置を提供する。【解決手段】Ｘ線検査装置１は、Ｘ線照射部７と、検出素子がＺ方向に並設されたＸ線ラインセンサ15と、スリット8aを備えたコリメータ８と、Ｘ線照射部７を移動させる第１アクチュエータ９と、スリットの中心線Ｃを回転軸としてコリメータを回転方向Ｂに移動させる第２アクチュエータ11と、制御部５を有する。制御部５は、第１アクチュエータを駆動してＸ線の検出量の平均が最も高いＸ線照射部のＸ方向の位置を決定し（図３）、次に第２アクチュエータを駆動してスリットの長手方向とＸ線ラインセンサの検出素子の並設方向が平行となるようにコリメータの位置を決める（図４）。【選択図】図２