INSPECTION DEVICE AND INSPECTION METHOD

To shorten an inspection time by varying an operation speed of a movable shaft drive section in consideration of size information of an electrode terminal being a contact destination of a probe.SOLUTION: An inspection device includes multiple movable probes and allows each one of the movable probes to be brought into contact with each one of multiple inspection objects on an inspected substrate, so as to measure electric characteristics between the multiple inspection objects. The inspection device includes: multiple movable sections for supporting each one of the movable probes, moving each one of the movable probes in multiple axial directions, positioning each one of the movable probes at positions of the inspection objects, and allowing each one of the movable probes to be brought into contact with the inspection objects; a drive section for driving each one of the movable sections to move each one of the movable probes; and a drive control section for controlling an operation speed of each one of the movable sections to move each one of the movable probes in accordance with size information of each one of the inspection objects being a next contact destination of each one of the movable probes.SELECTED DRAWING: Figure 1 【課題】プローブの接触先である電極端子のサイズ情報を考慮して、可動軸駆動部の動作速度を可変させて、検査時間を短縮する。【解決手段】本発明に係る検査装置は、複数の可動プローブを有し、被検査基板上の複数の検査対象物のそれぞれに各可動プローブを接触させて、複数の検査対象物間の電気的特性を測定する検査装置において、各可動プローブを支持して、各可動プローブを複数の軸方向に移動させて、検査対象物の位置に各可動プローブを位置決めし、各可動プローブを検査対象物に接触させる複数の可動部と、各可動プローブを移動させる各可動部を駆動する駆動部と、各可動プローブの次の接触先とする検査対象物のサイズ情報に応じて、各可動プローブを移動させる各可動部の動作速度を制御する駆動制御部とを備える。【選択図】 図１