MANUFACTURING METHOD OF FILM BODY, MANUFACTURING METHOD OF HYDROGEN DETECTION ELEMENT, FILM BODY, HYDROGEN DETECTION ELEMENT AND HYDROGEN DETECTOR

To provide a hydrogen detection element capable of improving responsiveness of hydrogen storage discharge to a hydrogen storage metal, and improved hydrogen detection sensitivity; and to provide a manufacturing method thereof, a film body useful therefor, a manufacturing method thereof, and a hydrogen detector.SOLUTION: A manufacturing method of a film body has a step (i) for forming an alloy layer containing palladium and another noble metal, and a step (ii) for bringing beforehand hydrogen into contact with the alloy layer formed in the step (i). A hydrogen detection element to be adopted is formed by depositing, on a substrate, a film body 14 comprising a hydrogen storage alloy 16 containing palladium and another noble metal, and having a crack 15 generated thereon.SELECTED DRAWING: Figure 5 【課題】水素吸蔵金属に対する水素吸蔵放出の応答性が向上し、かつ、水素の検出感度が高められた水素検出用素子及びその製造方法、これに有用な膜体及びその製造方法、並びに水素検出装置を提供する。【解決手段】パラジウム及びこれ以外の貴金属を含む合金層を形成する工程（ｉ）と、工程（ｉ）で形成された合金層に、予め水素を接触させる工程（ｉｉ）と、を有する膜体の製造方法を適用する。パラジウムとこれ以外の貴金属とを含む水素吸蔵合金１６からなり、クラック１５が生じている膜体１４を、基材上に成膜した水素検出用素子を採用する。【選択図】図５