CERAMIC INNER STRUCTURE OBSERVATION DEVICE AND INNER STRUCTURE ANALYSIS SYSTEM, CERAMIC INNER STRUCTURE OBSERVATION METHOD AND INNER STRUCTURE ANALYSIS METHOD, AND CERAMIC MANUFACTURING METHOD

To enable in-situ observation of a defatting step and a sintering step of ceramic, and elucidation of change in inner structure.SOLUTION: For a compact 1 which is produced by molding a raw material of ceramic and which is being subjected to heat treatment in a heat treatment furnace 11, light in an infrared region is applied from the outside of the heat treatment furnace 11 using an optical interference tomographic image generation device 20 to generate an optical interference tomographic image by optical interference tomography. Thus, an inner structure of the compact in a heat treatment process of ceramic in the heat treatment furnace can be observed as the optical interference tomographic image generated by the optical interference tomographic image generation device 20.SELECTED DRAWING: Figure 1 【課題】セラミックスの脱脂過程や焼結過程のその場観察、および内部構造変化の解明を可能にする。【解決手段】セラミックスの原料物質を成形してなる成形体１に対し熱処理を施す熱処理炉１１内において熱処理中の上記成形体１について、光干渉断層画像生成装置２０を用いて上記熱処理炉１１の外部から赤外線領域の光を照射して光干渉断層撮影を行い光干渉断層画像を生成することにより、上記光干渉断層画像生成装置２０により生成される光干渉断層画像として、上記熱処理炉によるセラミックスの熱処理過程における成形体内部の構造を観察可能にする。【選択図】図１