DEFOAMING APPARATUS

To provide a defoaming apparatus which is more small-sized and requires a shorter deforming time than heretofore.SOLUTION: In a defoaming apparatus 10 for removing air bubbles from a laminate W, a control part 50 is configured such that (1) a mounting part 21 of a stage 20 and the laminate W are mov...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	KINOSHITA TAKANORI, TANAKA SEIJI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING FREQUENCY-CHANGING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PHYSICS SEPARATION TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	To provide a defoaming apparatus which is more small-sized and requires a shorter deforming time than heretofore.SOLUTION: In a defoaming apparatus 10 for removing air bubbles from a laminate W, a control part 50 is configured such that (1) a mounting part 21 of a stage 20 and the laminate W are moved into a defoaming chamber 30 by actuating a slide mechanism 51, (2) a closed space is formed around the mounting part 21 by changing an operational state of top plate side and bottom plate side seal mechanisms 32a, 32b, 36a, 36b, (3) the closed space is pressurized by changing the operational state of a pressurizing/depressurizing pump 53, (4) the closed space is decompressed up to a normal pressure by changing an operational state of the pressurizing/depressurizing pump 53, (5) the closed space is opened by changing an operational state of the top plate side and bottom plate side seal mechanisms 32a, 32b, 36a, 36b, and (6) the mounting part 21 and the laminate W are moved to the outside of the deforming chamber 30 by actuating the slide mechanism 51.SELECTED DRAWING: Figure 6 【課題】従来よりも小型で、かつ脱泡に要する時間が短い脱泡装置を提供する。【解決手段】脱泡装置１０は、貼合体Ｗから気泡を除去するためのものであって、制御部５０が、（１）スライド機構５１を作動させることによりステージ２０の載置部２１および貼合体Ｗを脱泡室３０内に移動させ、（２）天板側および底板側シール機構３２ａ，３２ｂ，３６ａ，３６ｂの動作状態を変更することにより載置部２１のまわりに密閉空間を形成し、（３）加減圧用ポンプ５３の動作状態を変更することにより密閉空間を加圧し、（４）加減圧用ポンプ５３の動作状態を変更することにより密閉空間を常圧まで減圧し、（５）天板側および底板側シール機構３２ａ，３２ｂ，３６ａ，３６ｂの動作状態を変更することにより密閉空間を開放し、（６）スライド機構５１を作動させることにより載置部２１および貼合体Ｗを脱泡室３０外に移動させる、ように構成されている。【選択図】図６