LINEAR MOTOR MECHANISM AND TWO-AXIS STAGE

To provide a linear motor mechanism and a two-axis stage, capable of being used in a vacuum without causing a problem due to heat generation of a coil.SOLUTION: A linear motor mechanism 1 in which a stator and a movable element are arranged in a vacuum chamber 10, includes: a coil 3 as a stator; and...

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Bibliographische Detailangaben
Hauptverfasser:	SAKAI HIROSHI, IWADE TAKU, ISHI KAZUTERU, TAKEGAMI SATOSHI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVERSION OR DISTRIBUTION OF ELECTRIC POWER DYNAMO-ELECTRIC MACHINES ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY GENERATION
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Beschreibung
Zusammenfassung:	To provide a linear motor mechanism and a two-axis stage, capable of being used in a vacuum without causing a problem due to heat generation of a coil.SOLUTION: A linear motor mechanism 1 in which a stator and a movable element are arranged in a vacuum chamber 10, includes: a coil 3 as a stator; and a magnet 5 as a movable element. A coil holding unit 2 containing the coil 3 is fixed to the vacuum chamber 10. The vacuum chamber 10 has an opening 13, and a part of the coil holding unit 2 is exposed to the outside air through the opening 13.SELECTED DRAWING: Figure 1 【課題】コイルの発熱に起因する問題を生じさせずに真空中で使用することが可能なリニアモータ機構および二軸ステージを提供する。【解決手段】真空チャンバ１０内に固定子および可動子が配置されるリニアモータ機構１であり、固定子であるコイル３と、可動子である磁石５と、を備え、コイル３を内包するコイル保持部２が真空チャンバ１０に固定され、真空チャンバ１０は開口部１３を有し、開口部１３を介してコイル保持部２の一部が外気に露出している。【選択図】図１