RESIN MOLDING DEVICE, MOLDING MOLD, AND METHOD FOR PRODUCING RESIN MOLDED PRODUCT

To suppress a deformation of a molding object by resin molding by paying attention to a deformation volume of a substrate during resin molding.SOLUTION: A first mold 2 having a concavity 2M that holds a first surface Wa of a molding object W1 and forms a space with the first surface Wa, a second mol...

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Hauptverfasser: TANIGUCHI SHOICHI, HANASAKA SHUHO, IWATA YASUHIRO, GOTO TOMOYUKI, HANAZAKI MASANORI
Format: Patent
Sprache:eng ; jpn
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Zusammenfassung:To suppress a deformation of a molding object by resin molding by paying attention to a deformation volume of a substrate during resin molding.SOLUTION: A first mold 2 having a concavity 2M that holds a first surface Wa of a molding object W1 and forms a space with the first surface Wa, a second mold 3 having a cavity 3C that is provided to face the first mold 2 and accommodates a resin material J, a gas supply unit 6 that supplies gas into the concavity 2M, a deformation measurement unit 8 that measures information on deformation of the molding object W1, and a control unit 9 that controls a gas supply amount by the gas supply unit 6 based on a measurement result of the deformation measurement unit 8, are provided.SELECTED DRAWING: Figure 2 【課題】樹脂成形時の基板の変形量に着目して樹脂成形による成形対象物の変形を抑制することができる。【解決手段】成形対象物W1の第1面Waを保持し、第1面Waとの間で空間を形成する凹部2Mを有する第1型2と、第1型2に対向して設けられ、樹脂材料Jを収容するキャビティ3Cを有する第2型3と、凹部2M内に気体を供給する気体供給部6と、成形対象物W1の変形に関する情報を計測する変形計測部8と、変形計測部8の計測結果に基づいて、気体供給部6による気体の供給量を制御する制御部9とを備える。【選択図】図2