MOUNTING DEVICE AND MOUNTING METHOD
To realize a mounting device capable of recognizing the target of an object to be joined of the upper layer and the target of an object to be joined of the lower layer, and capable of joining objects to be joined of multiple layers.SOLUTION: A mounting device 1 has a bonding stage 37 for holding a w...
Gespeichert in:
Hauptverfasser: | , , |
---|---|
Format: | Patent |
Sprache: | eng ; jpn |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | To realize a mounting device capable of recognizing the target of an object to be joined of the upper layer and the target of an object to be joined of the lower layer, and capable of joining objects to be joined of multiple layers.SOLUTION: A mounting device 1 has a bonding stage 37 for holding a wiring board 2, i.e., an object to be joined of the lowermost layer, a bonding tool 42 for holding a semiconductor chip 3, i.e., an object to be joined of the upper layer joining to the wiring board 2, and a vertical two fields of view recognition optical system 12 having lower layer recognition means for recognizing the target 66 of the wiring board 2, and upper layer recognition means 16 for recognizing the target 69 of the semiconductor chip 3. The vertical two fields of view recognition optical system 12 has a first illumination unit 22 for the wiring board 2 and a second illumination unit 23 for the semiconductor chip 3, and the first illumination unit 22 and the second illumination unit 23 have a first light source 52 and a second light source 53 of different spectral wavelength ranges.SELECTED DRAWING: Figure 2
【課題】上層の被接合対象物及び下層の被接合対象物のターゲットを認識することが可能で、複数層の被接合対象物を接合することが可能な実装装置を実現すること。【解決手段】最下層の被接合対象物である配線基板2を保持するボンディングステージ37と、配線基板2に接合する上層の被接合対象物である半導体チップ3を保持するボンディングツール42と、配線基板2のターゲット66を認識する下層用認識手段及び半導体チップ3のターゲット69を認識する上層用認識手段16を有する上下2視野認識光学系12を有しており、上下2視野認識光学系12は、配線基板2用の第1の照明ユニット22及び半導体チップ3用の第2の照明ユニット23を有し、第1の照明ユニット22及び第2の照明ユニット23は共に分光波長域が異なる第1の光源52及び第2の光源53を有している実装装置1。【選択図】図2 |
---|