PHOTOELECTRIC CONVERSION ELEMENT, MANUFACTURING METHOD THEREOF, PHOTOELECTRIC CONVERSION MODULE, AND ELECTRONIC DEVICE

To provide a manufacturing method of a photoelectric conversion element capable of efficiently forming a good texture structure while suppressing a decrease in grinding accuracy, a photoelectric conversion element and a photoelectric conversion module with high grinding accuracy and high photoelectric conversion efficiency, and an electronic device including the photoelectric conversion element.SOLUTION: A manufacturing method of a photoelectric conversion element includes a step of grinding one surface 84W of a semiconductor substrate 800W, a step of forming a protective film 89 on a part of the other surface 85W of the semiconductor substrate 800W, and a step of performing an etching process on the one surface 84W of the semiconductor substrate, and the step of forming the protective film 89 is preferably a step using an inkjet method or a screen printing method.SELECTED DRAWING: Figure 14 【課題】研削精度の低下を抑えつつ、良好なテクスチャー構造を効率よく形成可能な光電変換素子の製造方法、研削精度が高く光電変換効率が高い光電変換素子および光電変換モジュール、ならびに、前記光電変換素子を備える電子機器を提供すること。【解決手段】半導体基板８００Ｗの一方の面８４Ｗを研削する工程と、半導体基板８００Ｗの他方の面８５Ｗの上方の一部に保護膜８９を形成する工程と、半導体基板の一方の面８４Ｗにエッチング処理を施す工程と、を有する光電変換素子の製造方法であって、保護膜８９を形成する工程は、インクジェット法またはスクリーン印刷法を用いる工程であることが好ましい。【選択図】図１４