SAMPLE ANALYZER, ELECTRON MICROSCOPE AND FOCUSING MIRROR UNIT

To irradiate decelerated charged particles to a sample so as not to lower detection efficiency of cathode luminescence.SOLUTION: A sample analyzer 100 for analyzing a sample W by detecting light emitted from the sample W which is irradiated with charged particles, includes an irradiation part 3 for...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	AWATA SHOGO
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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