SAMPLE ANALYZER, ELECTRON MICROSCOPE AND FOCUSING MIRROR UNIT

To irradiate decelerated charged particles to a sample so as not to lower detection efficiency of cathode luminescence.SOLUTION: A sample analyzer 100 for analyzing a sample W by detecting light emitted from the sample W which is irradiated with charged particles, includes an irradiation part 3 for...

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1. Verfasser:	AWATA SHOGO
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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Zusammenfassung:	To irradiate decelerated charged particles to a sample so as not to lower detection efficiency of cathode luminescence.SOLUTION: A sample analyzer 100 for analyzing a sample W by detecting light emitted from the sample W which is irradiated with charged particles, includes an irradiation part 3 for irradiating the sample W with the charged particles, and a focusing mirror 41 provided between the irradiation part 3 and the sample W, for focusing light emitted from the sample W, in which a deceleration electric field for decelerating the charged particles is generated between the irradiation part 3 and the focusing mirror 41.SELECTED DRAWING: Figure 4 【課題】カソードルミネッセンスの検出効率を低下させることなく、荷電粒子を減速させて試料に照射できるようにする。【解決手段】荷電粒子が照射された試料Ｗから出る光を検出して試料Ｗを分析する試料分析装置１００であって、荷電粒子を試料Ｗに照射する照射部３と、照射部３と試料Ｗとの間に設けられるとともに、試料Ｗから出る光を集光する集光ミラー４１とを具備し、照射部３及び集光ミラー４１の間に荷電粒子を減速させる減速電場が生じるようにした。【選択図】図４