PRESSURE DETECTION UNIT AND PRESSURE SENSOR USING THE SAME
To provide a pressure detection unit with which it is possible to suppress the adverse effect of welding when a ceramic base is soldered, and a pressure sensor using this pressure detection unit.SOLUTION: The pressure detection unit comprises: a ceramic base 110; a metal ring member 140 joined to th...
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Zusammenfassung: | To provide a pressure detection unit with which it is possible to suppress the adverse effect of welding when a ceramic base is soldered, and a pressure sensor using this pressure detection unit.SOLUTION: The pressure detection unit comprises: a ceramic base 110; a metal ring member 140 joined to the base 110 by soldering; a metal receiving member 120 joined to the ring member 140 by welding; a diaphragm 130 sandwiched between the ring member 140 and the receiving member 120; and a pressure detection device 150 attached to the base 110 on a pressure-receiving space S1 side that is formed between the base 110 and the diaphragm 130. A soldered part B between the base 110 and the ring member 140 is apart more than the thickness dimension of the ring member 140 from a welded part W between the receiving member 120 and the ring member 140.SELECTED DRAWING: Figure 3
【課題】セラミックス製のベースをロウ付けした際に、溶接の悪影響を抑制できる圧力検出ユニット及びこれを用いた圧力センサを提供する。【解決手段】圧力検出ユニットは、セラミックス製のベース110と、前記ベース110とロウ付けにより接合された金属製のリング部材140と、前記リング部材140と溶接により接合された金属製の受け部材120と、前記リング部材140と前記受け部材120との間に挟まれたダイアフラム130と、前記ベース110と前記ダイアフラム130との間に形成された受圧空間S1側において、前記ベース110に取り付けられた圧力検出装置150と、を有し、前記ベース110と前記リング部材140とのロウ付け部Bは、前記受け部材120と前記リング部材140との溶接部Wから、前記リング部材140の厚さ寸法より離間している。【選択図】図3 |
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