FILM FORMATION METHOD FOR SYNTHETIC RESIN-MADE MULTIPLE BOTTLE, AND FILM FORMATION APPARATUS THEREFOR
To provide a film formation method for synthetic resin-made multiple bottle that can properly form an amorphous carbon-containing film, and a film formation apparatus therefor.SOLUTION: The present invention relates to a film formation method for synthetic resin-made multiple bottle in which a synth...
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Zusammenfassung: | To provide a film formation method for synthetic resin-made multiple bottle that can properly form an amorphous carbon-containing film, and a film formation apparatus therefor.SOLUTION: The present invention relates to a film formation method for synthetic resin-made multiple bottle in which a synthetic resin-made multiple bottle 10 is housed in a processing chamber 4 of a plasma CVD apparatus 1, and plasma is generated inside an inner container body 121 to form an amorphous carbon-containing film on an inner surface of the inner container body 121. A third degree of vacuum outside an outer shell bottle 111 is set to a degree of vacuum at which the outer shell bottle 111 does not collapse for a first degree of vacuum in the inner container body 121 and a second degree of vacuum between the outer shell bottle 111 and inner container body 121, the first degree of vacuum and the second degree of vacuum are within a range of 1-50 Pa, and the difference between the first degree of vacuum and the second degree of vacuum is set to 30 Pa or less.SELECTED DRAWING: Figure 1
【課題】アモルファス炭素含有被膜を適切に形成することができる合成樹脂製多重ボトルの被膜形成方法、及びその被膜形成装置を提供する。【解決手段】合成樹脂製多重ボトル10を、プラズマCVD装置1の処理室4に収容し、内容器体121の内側にプラズマを発生させて、内容器体121の内面にアモルファス炭素含有被膜を形成する合成樹脂製多重ボトルの被膜形成方法であって、外殻ボトル111の外側の第3真空度は、内容器体121内の第1真空度及び外殻ボトル111と内容器体121との間の第2真空度に対して外殻ボトル111が潰れない程度の真空度に設定されており、第1真空度及び第2真空度は1Pa〜50Paの範囲内の真空度であり、且つ、第1真空度と第2真空度との差は30Pa以下に設定されている。【選択図】図1 |
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