PHYSICAL QUANTITY DETECTOR

To provide a physical quantity detector with which it is possible to reduce dust flowing into a second sub-passage branched from a first sub-passage and improve resistance to contamination.SOLUTION: Provided is a physical quantity detector 20 for detecting physical quantity of gas. A measurement uni...

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Bibliographische Detailangaben
Hauptverfasser: SAITO TOMOAKI, NAKAMURA MASAMICHI, FUKAYA SEIJI, KONO TSUTOMU, SAITO SUNAO, TASHIRO SHINOBU, UENODAN AKIRA
Format: Patent
Sprache:eng ; jpn
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Beschreibung
Zusammenfassung:To provide a physical quantity detector with which it is possible to reduce dust flowing into a second sub-passage branched from a first sub-passage and improve resistance to contamination.SOLUTION: Provided is a physical quantity detector 20 for detecting physical quantity of gas. A measurement unit 213 includes a first sub-passage 234a extending along the center axis of a main passage from an inlet 231 and leading to a first outlet 232, a second sub-passage 234b branched from the first sub-passage 234a toward a flange 211 and leading to a second outlet 233, and a rectification surface 227. The rectification surface 227 includes an upstream rectification surface 227a provided so as to get close to the flange 211 from an upstream end face 228 to a downstream side of the main passage, and a downstream rectification surface 227b provided downstream of the main passage from the upstream rectification surface 227a and extending up to a downstream end face 224 along the center axis of the main passage.SELECTED DRAWING: Figure 3 【課題】第1副通路から分岐した第2副通路に流入する塵埃を減少させ、耐汚損性を向上させることが可能な物理量検出装置を提供する。【解決手段】気体の物理量を検出する物理量検出装置20。計測部213は、入口231から主通路の中心軸に沿って延びて第1出口232に至る第1副通路234aと、第1副通路234aからフランジ211へ向けて分岐して第2出口233に至る第2副通路234bと、整流面227と、を有する。整流面227は、上流端面228から主通路の下流側へ向けてフランジ211に近づくように設けられた上流整流面227aと、上流整流面227aよりも主通路の下流側に設けられ下流端面224まで主通路の中心軸に沿って延びる下流整流面227bと、を有する。【選択図】図3