ORIENTED PIEZOELECTRIC FILM, METHOD OF MANUFACTURING THE SAME, AND LIQUID EJECTION HEAD

To provide a barium titanate-based film having both low Young's modulus and (111) orientation.SOLUTION: There is provided an oriented piezoelectric film composed of a perovskite-type crystal represented by the following general formula (1) BaCaTiZrO(0≤x≤0.2, 0≤y≤0.2), and the oriented piezoelec...

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Hauptverfasser:	KOTANI YOSHINORI, SHIMIZU CHIEMI, KOBAYASHI MOTOKAZU, OHASHI RYOTA, UCHIDA FUMIO
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR ARTIFICIAL STONE CEMENTS CERAMICS CHEMISTRY COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS CONCRETE CORRECTION OF TYPOGRAPHICAL ERRORS CRYSTAL GROWTH ELECTRICITY i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME LIME, MAGNESIA LINING MACHINES METALLURGY PERFORMING OPERATIONS PRINTING PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL REFRACTORIES SELECTIVE PRINTING MECHANISMS SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH SLAG STAMPS TRANSPORTING TREATMENT OF NATURAL STONE TYPEWRITERS UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
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Beschreibung
Zusammenfassung:	To provide a barium titanate-based film having both low Young's modulus and (111) orientation.SOLUTION: There is provided an oriented piezoelectric film composed of a perovskite-type crystal represented by the following general formula (1) BaCaTiZrO(0≤x≤0.2, 0≤y≤0.2), and the oriented piezoelectric film is formed on an oriented substrate oriented in a (111) plane, and the oriented piezoelectric film includes first crystal grains oriented in the (111) plane with respect to the film surface, and second crystal grains randomly oriented, and the first crystal grains have an average grain size of 300 to 600 nm, and the second crystal grains have an average particle size of 50 to 200 nm.SELECTED DRAWING: Figure 1 【課題】低ヤング率と（１１１）配向を両立したチタン酸バリウム系膜を提供する。【解決手段】下記一般式（１）Ｂａ１−ｘＣａｘＴｉ１−ｙＺｒｙＯ３（０≦ｘ≦０．２、０≦ｙ≦０．２）（１）で表されるペロブスカイト型結晶によって構成される配向性圧電体膜であって、前記配向性圧電体膜が（１１１）面に配向した配向性下地上に形成され、前記配向性圧電体膜が、膜面に対し（１１１）面に配向した第一の結晶粒と、ランダムに配向した第二の結晶粒とを含み、前記第一の結晶粒が３００〜６００ｎｍの平均粒径を有し、前記第二の結晶粒が５０〜２００ｎｍの平均粒径を有することを特徴とする、配向性圧電体膜を用いる。【選択図】図１