CONNECTION STRUCTURE OF OPTICAL WAVEGUIDE CHIP

To improve the cost for equipment while maintaining a method for easy and precise equipment.SOLUTION: The connection structure of an optical waveguide chip includes: a quartz-based PLC 103 in which trenches 114 and 122 are formed; a steel ball 106 for a spacer engaged with the trenches 114 and 122; and quartz-based PLCs 101 and 102 mounted on the quartz-based PLC 103 by being supported by the steel ball 106 for a spacer, the quartz-based PLCs 101 and 102 having trenches 107 and 119 engaged with the steel ball 106 for a spacer. A conductor wiring 123 in the quartz-based PLC 103 and a conductor wiring 120 in the quartz-based PLC 101 are electrically connected to each other by a conductor film 124 in the trench 114, the steel ball 106 for a spacer, and the conductor film 121 in the trench 107.SELECTED DRAWING: Figure 1 【課題】高精度で簡便な実装方法を維持しつつ、実装コストを改善する。【解決手段】光導波路チップの接続構造は、溝１１４，１２２が形成された石英系ＰＬＣ１０３と、溝１１４，１２２と嵌合するスペーサ用鋼球１０６と、スペーサ用鋼球１０６と嵌合する溝１０７，１１９が形成され、スペーサ用鋼球１０６によって支持される形で石英系ＰＬＣ１０３上に搭載された石英系ＰＬＣ１０１，１０２を備える。石英系ＰＬＣ１０３に形成された導体配線１２３と石英系ＰＬＣ１０１に形成された導体配線１２０とは、溝１１４に形成された導体膜１２４とスペーサ用鋼球１０６と溝１０７に形成された導体膜１２１とにより電気的に接続される。【選択図】 図１