CLEANING DEVICE AND OPERATION METHOD OF THE CLEANING DEVICE

To reduce a waste amount of a solvent while preventing reattachment of stain on a cleaning object.SOLUTION: A cleaning device 1 includes: two or more cleaning tanks which includes a first cleaning tank 11 and a second cleaning tank 12 positioned on an upstream side than the first cleaning tank; a cleaning liquid reproduction part 20 which reproduces a cleaning liquid supplied from the cleaning tanks and supplies to the cleaning tanks; piping 52 which connects the cleaning liquid reproduction part, and the first cleaning tank and the second cleaning tank; and a controller 30 which controls a flow of the cleaning liquid in the cleaning liquid reproduction part and the piping. The cleaning liquid reproduction part has two operation modes of a concentrating mode in which stain contained in the cleaning liquid is concentrated, and a normal mode without concentration. The controller controls the flow of the cleaning liquid in the piping so that the reproduced cleaning liquid is delivered to the second cleaning tank in the normal mode, and controls the flow of the cleaning liquid in the piping so that the reproduced cleaning liquid is delivered to the first cleaning tank in the concentrating mode.SELECTED DRAWING: Figure 1 【課題】洗浄対象への汚れの再付着を防ぎつつ、溶剤の廃棄量を低減する。【解決手段】洗浄装置１は、第一洗浄槽１１と、第一洗浄槽よりも上流側に位置する第二洗浄槽１２とを含む２以上の洗浄槽と、洗浄槽から供給された洗浄液を再生し、洗浄槽に供給する洗浄液再生部２０と、洗浄液再生部と、第一洗浄槽および第二洗浄槽とを接続する配管５２と、洗浄液再生部および配管内の洗浄液の流れを制御するコントローラ３０とを備える。洗浄液再生部は、洗浄液に含まれる汚れを濃縮する濃縮モードと、濃縮を伴わない通常モードとの二つの運転モードを有し、コントローラは、通常モードにおいて、再生された洗浄液が第二洗浄槽に送られるように配管内の洗浄液の流れを制御し、濃縮モードにおいて、再生された洗浄液が第一洗浄槽に送られるように配管内の洗浄液の流れを制御する。【選択図】図１